MEMS Mirrors Submerged In Liquid For Wide-Angle Scanning

MEMS mirrors have been used in a wide range of applications such as telecommunication, optical imaging, displays, and laser ranging. Large mirror size, large scan range, high speed and low drive voltage are always desired but remain conflicting aims. In this work, we utilize the “Snell window” effect to enlarge the scan angle by submerging MEMS mirrors into liquid whose refraction index is greater than in air. Read More (Coming soon)…